| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16b.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZGivnK2Y/S9jfT |
| Repository | sid.inpe.br/mtc-m17@80/2007/11.13.13.10 (restricted access) |
| Last Update | 2007:11.13.13.10.45 (UTC) marciana |
| Metadata Repository | sid.inpe.br/mtc-m17@80/2007/11.13.13.10.46 |
| Metadata Last Update | 2024:05.17.11.33.07 (UTC) marciana |
| Secondary Key | INPE-14901-PRE/9815 |
| ISSN | 1434-6060 |
| Label | self-archiving-INPE-MCTIC-GOV-BR |
| Citation Key | TanUeRoDiAbRe:2007:NiPlIo |
| Title | Nitrogen plasma ion implantation in silicon using short pulse high voltage glow discharges  |
| Year | 2007 |
| Month | Sept. |
| Access Date | 2024, May 18 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 473 KiB |
| 2. Context | |
| Author | 1 Tan, Ing Hwie 2 Ueda, Mário 3 Rossi, José Osvaldo 4 Diaz, B. 5 Abramof, Eduardo 6 Reuther, H. |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JHDC 2 3 4 5 8JMKD3MGP5W/3C9JGUH |
| Group | 1 LAP-INPE-MCT-BR 2 LAP-INPE-MCT-BR 3 LAP-INPE-MCT-BR 4 LAS-INPE-MCT-BR 5 LAS-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Instituto Nacional de Pesquisas Espaciais (INPE) 6 Research Center Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 40 |
| Number | 17 |
| Pages | 5196-5201 |
| History (UTC) | 2007-11-13 13:10:46 :: simone -> administrator :: 2008-06-29 02:36:51 :: administrator -> banon :: 2008-11-06 18:41:22 :: banon -> administrator :: 2012-10-23 23:58:45 :: administrator -> simone :: 2007 2013-02-20 15:20:02 :: simone -> administrator :: 2007 2018-06-05 03:35:01 :: administrator -> marciana :: 2007 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Version Type | publisher |
| Keywords | X-RAY-DIFFRACTION ALUMINUM DYNAMICS |
| Abstract | A high voltage ( HV) pulse generator based on Blumlein technology was used to implant nitrogen ions into silicon substrates by immersion in a plasma generated by the HV pulse itself. Working pressures, applied HVs and treatment times were varied. Elemental depth profiles determined by Auger electron spectroscopy showed deeper penetration for higher voltages and broader profiles for increased treatment times indicating higher diffusion, as expected. Penetration depths, however, were about half of the values calculated by the SRIM code, probably due to the short duration of the HV pulse. The high- resolution x- ray diffraction omega/ 2. scans measured around the ( 0 0 4) Si Bragg reflection of implanted samples had shoulders in the lower. side, indicating a lattice expansion in the direction normal to the surface. Dynamical diffraction theory of Takagi - Taupin was used to fit the measured spectra, thus finding the strain profiles in the implanted samples. Both maximum strain values and integrated strains increased for samples implanted with higher voltages and treatment times and were almost independent of pressure. |
| Area | FISPLASMA |
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Nitrogen plasma ion... |
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Nitrogen plasma ion... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | nitrogen plasma ion implantation.pdf |
| User Group | administrator banon simone |
| Reader Group | administrator marciana |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft12 |
| Read Permission | deny from all and allow from 150.163 |
| Update Permission | not transferred |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | lcp.inpe.br/ignes/2004/02.12.18.39 cptec.inpe.br/walmeida/2003/04.25.17.12 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel doi e-mailaddress electronicmailaddress format isbn lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |